Roots Vacuum Pumps

  • Leybold uses Roots technology for vacuum applications, and now RUVAC Roots pumps can meet the process requirements of all demanding vacuum applications.
  • RUVAC Roots pumps are often used as "booster pumps" to help smaller backing pumps to evacuate larger chambers, or to pump the chamber to a better vacuum. Typical applications include heat treatment, industrial furnaces, metallurgy and large format coatings.
  • RUVAC Roots pumps have become a standard in the architectural glass coating industry. Combined with a single-stage rotary vane vacuum pump to form an oil system for evacuation of the sample chamber; it can also be combined with a dry screw vacuum pump to form a pure dry system for process chamber applications.

Pumping speed

253-2000m3/h

Vacuum degree

12-80mbar

Power

1.1-7.5KW

  • Features of LEYBOLD Roots Vacuum Pumps:
  • RUVAC Roots pump (also known as Roots blower) has two symmetrically arranged impellers in the pump casing that rotate in opposite directions, which is suitable for applications requiring high pumping speed. Cooperate with the backing pump. RUVAC WA series Roots pumps are equipped with an air-cooled standard three-phase motor directly connected to the flange, and the radial shaft seal made of FPM (FKM) is oil lubricated to realize the seal of the shaft to the external atmospheric pressure. RUVAC WS series Roots pumps are driven by air-cooled or water-cooled canned motors. The equipped frequency converter can prevent the pump from mechanical overload. The RUVAC WH / WHU series is equipped with a completely sealed motor without shaft seal and a built-in water cooling unit. The optional purge gas system can be used to evacuate corrosive and toxic gases.
  • Reduce the ultimate pressure.
    According to general experience, the limit pressure of the system is reduced to 1/10 of the original after the Roots vacuum pump is configured. The ultimate pressure of the combination of two-stage Roots and the corresponding backing pump can reach the order of 10-5mbar (0.75 x 10-5 Torr). In some cases, there is no need to install a high vacuum pump (turbo molecular pump or diffusion pump).
  • Increase pumping speed
    Because the rotor is non-contact rotating, Roots vacuum pumps can run at high speeds, and pumps with small geometric dimensions can also achieve very high pumping speeds. In the low and medium vacuum range, the pumping speed of a single pump exceeds 1500m3/h (589 cfm). Only Roots vacuum pumps To reach. Choosing a suitable combination of foreline pump and Roots pump, even a small pumping speed foreline pump can pump a large amount of gas. Compared with a single backing pump with the same pumping speed, the energy consumption is greatly reduced.
  • The application of Roots vacuum pumps in the field of vacuum technology has also been further specialized development:
  • -The design of the integrated bypass pipe (pressure equalization pipeline) realizes the utilization of the pumping speed of the Roots pump in the high pressure section, which can shorten the pumping time, and is especially suitable for periodic processes (see "With/without bypass (Pumping speed curve comparison chart)
  • -High-purity gas or hazardous gas has strict requirements on the air tightness of the system. The WS Roots pump series with canned motors or the WH Roots pump series with hermetic motors are completely sealed. The system does not have dynamic seals to avoid air and oil leakage problems. The trouble-free operation time exceeds 20,000 hours.
  • -The precise dynamic balance of the rotor, combined with forced-lubricated bearings and gears, allows the Roots pump to run at high speeds. The speed can be changed by configuring the inverter. Increase the speed during the process to achieve a high pumping speed, and reduce the speed during the process stop or process interval. This operation can reduce energy consumption and prolong the service life of the Roots pump without affecting the reliability.
  • -The operation of turning vertical airflow into horizontal airflow can be easily performed at the installation site of the pump, which is very suitable for the different requirements of the system operating conditions. Another feature of Roots pump is that there is no oil in the pump cavity of Roots pump. This feature brings the following advantages to Roots pump:
  • -The pumped medium is not contaminated by lubricating oil or sealant; no complicated auxiliary accessories (exhaust filter, separator, etc.) are required;
  • -The lubricating oil in the gearbox is not affected by the pumped medium and will not shorten its service life;-The above characteristics of the roots vacuum pump to prevent the backflow of oil and gas from the backing pump to the connected vacuum chamber make it very suitable for the rough and medium vacuum ranges Various applications.
  • Features of LEYBOLD Roots Vacuum Pumps:
  • RUVAC Roots pump (also known as Roots blower) has two symmetrically arranged impellers in the pump casing that rotate in opposite directions, which is suitable for applications requiring high pumping speed. Cooperate with the backing pump. RUVAC WA series Roots pumps are equipped with an air-cooled standard three-phase motor directly connected to the flange, and the radial shaft seal made of FPM (FKM) is oil lubricated to realize the seal of the shaft to the external atmospheric pressure. RUVAC WS series Roots pumps are driven by air-cooled or water-cooled canned motors. The equipped frequency converter can prevent the pump from mechanical overload. The RUVAC WH / WHU series is equipped with a completely sealed motor without shaft seal and a built-in water cooling unit. The optional purge gas system can be used to evacuate corrosive and toxic gases.
  • Reduce the ultimate pressure.
    According to general experience, the limit pressure of the system is reduced to 1/10 of the original after the Roots vacuum pump is configured. The ultimate pressure of the combination of two-stage Roots and the corresponding backing pump can reach the order of 10-5mbar (0.75 x 10-5 Torr). In some cases, there is no need to install a high vacuum pump (turbo molecular pump or diffusion pump).
  • Increase pumping speed
    Because the rotor is non-contact rotating, Roots vacuum pumps can run at high speeds, and pumps with small geometric dimensions can also achieve very high pumping speeds. In the low and medium vacuum range, the pumping speed of a single pump exceeds 1500m3/h (589 cfm). Only Roots vacuum pumps To reach. Choosing a suitable combination of foreline pump and Roots pump, even a small pumping speed foreline pump can pump a large amount of gas. Compared with a single backing pump with the same pumping speed, the energy consumption is greatly reduced.
  • The application of Roots vacuum pumps in the field of vacuum technology has also been further specialized development:
  • -The design of the integrated bypass pipe (pressure equalization pipeline) realizes the utilization of the pumping speed of the Roots pump in the high pressure section, which can shorten the pumping time, and is especially suitable for periodic processes (see "With/without bypass (Pumping speed curve comparison chart)
  • -High-purity gas or hazardous gas has strict requirements on the air tightness of the system. The WS Roots pump series with canned motors or the WH Roots pump series with hermetic motors are completely sealed. The system does not have dynamic seals to avoid air and oil leakage problems. The trouble-free operation time exceeds 20,000 hours.
  • -The precise dynamic balance of the rotor, combined with forced-lubricated bearings and gears, allows the Roots pump to run at high speeds. The speed can be changed by configuring the inverter. Increase the speed during the process to achieve a high pumping speed, and reduce the speed during the process stop or process interval. This operation can reduce energy consumption and prolong the service life of the Roots pump without affecting the reliability.
  • -The operation of turning vertical airflow into horizontal airflow can be easily performed at the installation site of the pump, which is very suitable for the different requirements of the system operating conditions. Another feature of Roots pump is that there is no oil in the pump cavity of Roots pump. This feature brings the following advantages to Roots pump:
  • -The pumped medium is not contaminated by lubricating oil or sealant; no complicated auxiliary accessories (exhaust filter, separator, etc.) are required;
  • -The lubricating oil in the gearbox is not affected by the pumped medium and will not shorten its service life;-The above characteristics of the roots vacuum pump to prevent the backflow of oil and gas from the backing pump to the connected vacuum chamber make it very suitable for the rough and medium vacuum ranges Various applications.

Nominal pumping speed:  m3 x h-1:251-2460

Ultimate total pressure mbar:< 4 x 10-2(< 3 x 10-2) 

  • Air cooling
  • Water cooling